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Chapter title |
Ionization Characteristic of Different Gases Inside Zinc Oxide Target During Sputtering Process Simulated Using SRIM Software
|
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Chapter number | 37 |
Book title |
Enabling Industry 4.0 through Advances in Manufacturing and Materials
|
Published by |
Springer, Singapore, January 2022
|
DOI | 10.1007/978-981-19-2890-1_37 |
Book ISBNs |
978-9-81-192889-5, 978-9-81-192890-1
|
Authors |
Nazri, N. S. M., Mamat, M. H., Parimon, N., Malek, M. F., Yaakob, M. K., Suriani, A. B., Mohamed, A., Ahmad, M. K., Nayan, N., Shameem Banu, I. B., Vasimalai, N., Ahmad, M. Y., Rusop, M. |