International Youth Conference on Electronics, Telecommunications and Information Technologies
Springer International Publishing
Chapter title |
Research of the Microelectromechanical Device Cross-Shaped Element
|
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Chapter number | 33 |
Book title |
International Youth Conference on Electronics, Telecommunications and Information Technologies
|
Published by |
Springer, Cham, January 2022
|
DOI | 10.1007/978-3-030-81119-8_33 |
Book ISBNs |
978-3-03-081118-1, 978-3-03-081119-8
|
Authors |
Lysenko, Igor E., Kidyaev, Nikolai F., Ezhova, Olga A. |