International Youth Conference on Electronics, Telecommunications and Information Technologies
Springer International Publishing
Chapter title |
Numerical Simulation of CVD Reactor for Oxide Semiconductor Layer Deposition
|
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Chapter number | 24 |
Book title |
International Youth Conference on Electronics, Telecommunications and Information Technologies
|
Published by |
Springer, Cham, January 2022
|
DOI | 10.1007/978-3-030-81119-8_24 |
Book ISBNs |
978-3-03-081118-1, 978-3-03-081119-8
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Authors |
Kleimanov, Roman, Korshunov, Andrey, Kondrateva, Anastasia, Karaseov, Platon, Mishin, Maxim, Enns, Yakov, Komarevtsev, Ivan |
Country | Count | As % |
---|---|---|
Unknown | 3 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 1 | 33% |
Researcher | 1 | 33% |
Unknown | 1 | 33% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 1 | 33% |
Unknown | 2 | 67% |