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Grain size dependence of dielectric relaxation in cerium oxide as high-k layer

Overview of attention for article published in Discover Nano, April 2013
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Title
Grain size dependence of dielectric relaxation in cerium oxide as high-k layer
Published in
Discover Nano, April 2013
DOI 10.1186/1556-276x-8-172
Pubmed ID
Authors

Chun Zhao, Ce Zhou Zhao, Matthew Werner, Steve Taylor, Paul Chalker, Peter King

Abstract

Cerium oxide (CeO2) thin films used liquid injection atomic layer deposition (ALD) for deposition and ALD procedures were run at substrate temperatures of 150°C, 200°C, 250°C, 300°C, and 350°C, respectively. CeO2 were grown on n-Si(100) wafers. Variations in the grain sizes of the samples are governed by the deposition temperature and have been estimated using Scherrer analysis of the X-ray diffraction patterns. The changing grain size correlates with the changes seen in the Raman spectrum. Strong frequency dispersion is found in the capacitance-voltage measurement. Normalized dielectric constant measurement is quantitatively utilized to characterize the dielectric constant variation. The relationship extracted between grain size and dielectric relaxation for CeO2 suggests that tuning properties for improved frequency dispersion can be achieved by controlling the grain size, hence the strain at the nanoscale dimensions.

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 31 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Spain 1 3%
Unknown 30 97%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 13 42%
Student > Master 3 10%
Researcher 3 10%
Professor 2 6%
Student > Doctoral Student 1 3%
Other 3 10%
Unknown 6 19%
Readers by discipline Count As %
Materials Science 13 42%
Chemistry 4 13%
Chemical Engineering 2 6%
Engineering 2 6%
Physics and Astronomy 2 6%
Other 3 10%
Unknown 5 16%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 1. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 15 April 2013.
All research outputs
#22,758,309
of 25,371,288 outputs
Outputs from Discover Nano
#798
of 1,146 outputs
Outputs of similar age
#183,835
of 209,600 outputs
Outputs of similar age from Discover Nano
#14
of 68 outputs
Altmetric has tracked 25,371,288 research outputs across all sources so far. This one is in the 1st percentile – i.e., 1% of other outputs scored the same or lower than it.
So far Altmetric has tracked 1,146 research outputs from this source. They receive a mean Attention Score of 3.5. This one is in the 1st percentile – i.e., 1% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 209,600 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 68 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.