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Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography

Overview of attention for article published in Discover Nano, February 2013
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Citations

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Title
Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography
Published in
Discover Nano, February 2013
DOI 10.1186/1556-276x-8-75
Pubmed ID
Authors

Matteo Lorenzoni, Andrea Giugni, Bruno Torre

Abstract

A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass by tuning the applied bias. The layer deposited with a positively biased tip with sub-100-nm lateral resolution consists of nanocrystalline graphite, as verified by Raman spectroscopy. The oxide pattern obtained in opposite polarization is later used as a mask for dry etching, showing a remarkable selectivity in SF6 plasma, to produce Si nanofeatured molds.

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 16 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Saudi Arabia 1 6%
Unknown 15 94%

Demographic breakdown

Readers by professional status Count As %
Researcher 8 50%
Student > Ph. D. Student 4 25%
Student > Bachelor 2 13%
Student > Doctoral Student 1 6%
Unknown 1 6%
Readers by discipline Count As %
Physics and Astronomy 6 38%
Materials Science 3 19%
Chemistry 2 13%
Social Sciences 1 6%
Agricultural and Biological Sciences 1 6%
Other 1 6%
Unknown 2 13%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 1. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 13 February 2013.
All research outputs
#22,759,802
of 25,374,917 outputs
Outputs from Discover Nano
#798
of 1,146 outputs
Outputs of similar age
#263,751
of 296,588 outputs
Outputs of similar age from Discover Nano
#22
of 89 outputs
Altmetric has tracked 25,374,917 research outputs across all sources so far. This one is in the 1st percentile – i.e., 1% of other outputs scored the same or lower than it.
So far Altmetric has tracked 1,146 research outputs from this source. They receive a mean Attention Score of 3.5. This one is in the 1st percentile – i.e., 1% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 296,588 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 89 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.