Handbook of Laser Micro- and Nano-Engineering
Springer International Publishing
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X Demographics
| Chapter title |
Excimer Lasers for Lithography and Annealing
|
|---|---|
| Chapter number | 53 |
| Book title |
Handbook of Laser Micro- and Nano-Engineering
|
| Published by |
Springer, Cham, November 2021
|
| DOI | 10.1007/978-3-030-63647-0_53 |
| Book ISBNs |
978-3-03-063646-3, 978-3-03-063647-0
|
| Authors |
Mizoguchi, Hakaru, Oga, Toshihiro, Kakizaki, Kouji, Fujimoto, Junichi, Fechner, Burkhard |
X Demographics
The data shown below were collected from the profile of 1 X user who shared this research output. Click here to find out more about how the information was compiled.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 1 | 100% |
Demographic breakdown
| Type | Count | As % |
|---|---|---|
| Members of the public | 1 | 100% |