↓ Skip to main content
What is this page? Embed badge

Fundamental Electron Interactions with Plasma Processing Gases

Overview of attention for book
Cover of 'Fundamental Electron Interactions with Plasma Processing Gases'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Fundamental Electron-Molecule Interactions and Their Technological Significance
  3. Altmetric Badge
    Chapter 2 Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients
  4. Altmetric Badge
    Chapter 3 Synthesis and Assessment of Electron Collision Data
  5. Altmetric Badge
    Chapter 4 Electron Interactions with CF 4 , C 2 F 6 , and C 3 F 8
  6. Altmetric Badge
    Chapter 5 Electron Interactions with CHF 3 , CF 3 I, and c -C 4 F 8
  7. Altmetric Badge
    Chapter 6 Electron Interactions with Cl 2 , CCl 2 F 2 , BCl 3 , and SF 6
Attention for Chapter 4: Electron Interactions with CF 4 , C 2 F 6 , and C 3 F 8
Altmetric Badge

Citations

dimensions_citation
174 Dimensions
Summary Dimensions citations
You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output. Click here to find out more.
Chapter title
Electron Interactions with CF 4 , C 2 F 6 , and C 3 F 8
Chapter number 4
Book title
Fundamental Electron Interactions with Plasma Processing Gases
Published by
Springer, Boston, MA, January 2004
DOI 10.1007/978-1-4419-8971-0_4
Book ISBNs
978-1-4613-4741-5, 978-1-4419-8971-0
Authors

Loucas G. Christophorou, James K. Olthoff

View on publisher site

This page is provided by Altmetric.