↓ Skip to main content
What is this page? Embed badge

Semiconductor Lithography : Principles, Practices, and Materials

Overview of attention for book
Cover of 'Semiconductor Lithography : Principles, Practices, and Materials'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Introduction
  3. Altmetric Badge
    Chapter 2 Positive Photoresists
  4. Altmetric Badge
    Chapter 3 Positive Radiation Resists
  5. Altmetric Badge
    Chapter 4 Negative Photoresists
  6. Altmetric Badge
    Chapter 5 Negative Radiation Resists
  7. Altmetric Badge
    Chapter 6 Surface Preparation and Coating
  8. Altmetric Badge
    Chapter 7 Prebake (Softbake)
  9. Altmetric Badge
    Chapter 8 Optical Exposure
  10. Altmetric Badge
    Chapter 9 Radiation Exposure
  11. Altmetric Badge
    Chapter 10 Developing Resist Images
  12. Altmetric Badge
    Chapter 11 Postbake
  13. Altmetric Badge
    Chapter 12 Additive Processes
  14. Altmetric Badge
    Chapter 13 Subtractive Etching
  15. Altmetric Badge
    Chapter 14 Stripping of Resists
  16. Altmetric Badge
    Chapter 15 Process Controls
  17. Altmetric Badge
    Chapter 16 Nonresist Processes
  18. Altmetric Badge
    Chapter 17 Summary and Future Processes
Attention for Chapter 7: Prebake (Softbake)
Altmetric Badge

Citations

dimensions_citation
442 Dimensions

Readers on

mendeley
10 Mendeley
Summary Dimensions citations
So far, Dimensions has found 442 publications that cite this research output.

442

The most recent citing publications are shown below. View all 442 publications that cite this research output on Dimensions.

This page shows the most recent citations of this research output.

Click here to find out how to access more activity.

This page is provided by Altmetric.