Fatigue spectrum prediction and stretching force estimation of free-standing thin-film membranes for semiconductor manufacturing
Article in Materials Science in Semiconductor Processing (May 2024)
The most recent citing publications are shown below. View all 10 publications that cite this research output on Dimensions.
Article in Materials Science in Semiconductor Processing (May 2024)
Article in International Journal of Mechanical Sciences (May 2024)
Article in Forces in Mechanics (February 2024)