Encyclopedia of Nanotechnology
Springer Netherlands
Chapter title |
Photolithography
|
---|---|
Chapter number | 342 |
Book title |
Encyclopedia of Nanotechnology
|
Published by |
Springer, Dordrecht, January 2014
|
DOI | 10.1007/978-94-007-6178-0_342-2 |
Book ISBNs |
978-9-40-076178-0
|
Authors |
Marc Madou, Chunlei (Peggy) Wang |
Country | Count | As % |
---|---|---|
Unknown | 5 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 1 | 20% |
Student > Bachelor | 1 | 20% |
Student > Doctoral Student | 1 | 20% |
Unknown | 2 | 40% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 2 | 40% |
Chemical Engineering | 1 | 20% |
Unknown | 2 | 40% |