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Timeline
Chapter title |
Dual Exposure Glass Layer Suspended Structures (DEGLaSS): A Novel Fabrication Process for Glass Micro-Fluidic Nanostructures on Planar Substrates
|
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Chapter number | 171 |
Book title |
Micro Total Analysis Systems 2001
|
Published by |
Springer, Dordrecht, January 2001
|
DOI | 10.1007/978-94-010-1015-3_171 |
Book ISBNs |
978-9-40-103893-5, 978-9-40-101015-3
|
Authors |
D. M. Tanenbaum, Y. Chen, H. G. Craighead, Tanenbaum, D. M., Chen, Y., Craighead, H. G. |