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Metal Impurities in Silicon-Device Fabrication

Overview of attention for book
Attention for Chapter 4: Properties of the Main Impurities
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Citations

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2 Mendeley
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Chapter title
Properties of the Main Impurities
Chapter number 4
Book title
Metal Impurities in Silicon-Device Fabrication
Published by
Springer, Berlin, Heidelberg, January 1995
DOI 10.1007/978-3-642-97593-6_4
Book ISBNs
978-3-64-297595-0, 978-3-64-297593-6
Authors

Klaus Graff, Graff, Klaus

Timeline

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Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 2 100%

Demographic breakdown

Readers by professional status Count As %
Unspecified 1 50%
Student > Master 1 50%
Readers by discipline Count As %
Unspecified 1 50%
Materials Science 1 50%