Percolation, Localization, and Superconductivity
Springer US
Chapter title |
Fabrication of Sub-0.1 μm Fine Metal Lines Using High Resolution Electron Beam Techniques with Contamination Resist
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Chapter number | 11 |
Book title |
Percolation, Localization, and Superconductivity
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Published by |
Springer, Boston, MA, January 1984
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DOI | 10.1007/978-1-4615-9394-2_11 |
Book ISBNs |
978-1-4615-9396-6, 978-1-4615-9394-2
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Authors |
R. B. Laibowitz, C. P. Umbach |