Advances in Neural Network Research and Applications
Springer Science & Business Media
Chapter title |
Radial Basis Function Network for Endpoint Detection in Plasma Etch Process
|
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Chapter number | 29 |
Book title |
Advances in Neural Network Research and Applications
|
Published by |
Springer, Berlin, Heidelberg, January 2010
|
DOI | 10.1007/978-3-642-12990-2_29 |
Book ISBNs |
978-3-64-212989-6, 978-3-64-212990-2
|
Authors |
Shu-Kun Zhao, Min-Woo Kim, Yi-Seul Han, Se-Youn Jeon, Yun-Keun Lee, Seung-Soo Han, Zhao, Shu-Kun, Kim, Min-Woo, Han, Yi-Seul, Jeon, Se-Youn, Lee, Yun-Keun, Han, Seung-Soo |
Country | Count | As % |
---|---|---|
Unknown | 8 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Master | 2 | 25% |
Student > Doctoral Student | 2 | 25% |
Student > Ph. D. Student | 1 | 13% |
Professor > Associate Professor | 1 | 13% |
Unknown | 2 | 25% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 4 | 50% |
Physics and Astronomy | 1 | 13% |
Computer Science | 1 | 13% |
Unknown | 2 | 25% |