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Timeline
Chapter title |
Photon Stimulated Desorption of Fluorine from Silicon Etched by XeF 2
|
---|---|
Chapter number | 7 |
Book title |
Desorption Induced by Electronic Transitions DIET IV
|
Published by |
Springer, Berlin, Heidelberg, January 1990
|
DOI | 10.1007/978-3-642-84145-3_7 |
Book ISBNs |
978-3-64-284147-7, 978-3-64-284145-3
|
Authors |
J. A. Yarmoff, S. A. Joyce, C. W. Lo, J. Song |