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Chapter title |
Preliminary Survey
|
---|---|
Chapter number | 1 |
Book title |
The Physics of Micro/Nano-Fabrication
|
Published by |
Springer, Boston, MA, January 1992
|
DOI | 10.1007/978-1-4757-6775-9_1 |
Book ISBNs |
978-1-4419-3221-1, 978-1-4757-6775-9
|
Authors |
Ivor Brodie, Julius J. Muray |