Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals…
Springer Netherlands
Chapter title |
Deposition Fundamentals and Properties of Metallic and Diffusion Barrier Films
|
---|---|
Chapter number | 26 |
Book title |
Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
|
Published by |
Springer, Dordrecht, January 1993
|
DOI | 10.1007/978-94-011-1727-2_26 |
Book ISBNs |
978-9-40-104757-9, 978-9-40-111727-2
|
Authors |
Y. Pauleau |
Country | Count | As % |
---|---|---|
Unknown | 3 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Professor | 1 | 33% |
Student > Master | 1 | 33% |
Unknown | 1 | 33% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 1 | 33% |
Unknown | 2 | 67% |