Handbook of Manufacturing Engineering and Technology
Springer London
Chapter title |
Microtool Fabrication by Focused Ion Beam Technology
|
---|---|
Chapter number | 67 |
Book title |
Handbook of Manufacturing Engineering and Technology
|
Published by |
Springer, London, January 2013
|
DOI | 10.1007/978-1-4471-4976-7_67-3 |
Book ISBNs |
978-1-4471-4976-7
|
Authors |
Wei Wu, Wanli Li, Fengzhou Fang, Zong Wei Xu, Wu, Wei, Li, Wanli, Fang, Fengzhou, Xu, Zong Wei |