MEMS and Nanotechnology, Volume 2
Springer New York
Chapter title |
Improvement of Piezoresistive Microcantilever Beams for Gas Detection and Sensing
|
---|---|
Chapter number | 21 |
Book title |
MEMS and Nanotechnology, Volume 2
|
Published by |
Springer, New York, NY, January 2011
|
DOI | 10.1007/978-1-4419-8825-6_21 |
Book ISBNs |
978-1-4419-8824-9, 978-1-4419-8825-6
|
Authors |
Ni Wang, Bruce W. Alphenaar, Robert S. Keyton, Roger D. Bradshaw, Wang, Ni, Alphenaar, Bruce W., Keyton, Robert S., Bradshaw, Roger D. |