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Chapter title |
New Insight into Pile-Up in Thin Film Indentation
|
---|---|
Chapter number | 7 |
Book title |
MEMS and Nanotechnology, Volume 6
|
Published by |
Springer, New York, NY, January 2013
|
DOI | 10.1007/978-1-4614-4436-7_7 |
Book ISBNs |
978-1-4614-4435-0, 978-1-4614-4436-7
|
Authors |
Kevin Schwieker, James Frye, Barton C. Prorok |