Automation 2017
Springer, Cham
Chapter title |
Calibration of Scanning Electron Microscope with Improved Model of the Silicon Relief Measure
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Chapter number | 44 |
Book title |
Automation 2017
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Published by |
Springer, Cham, March 2017
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DOI | 10.1007/978-3-319-54042-9_44 |
Book ISBNs |
978-3-31-954041-2, 978-3-31-954042-9
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Authors |
Anton Shantyr, Eugenij Volodarski, Zygmunt L. Warsza |