Springer Handbook of Automation
Springer International Publishing
Chapter title |
Semiconductor Manufacturing Automation
|
---|---|
Chapter number | 38 |
Book title |
Springer Handbook of Automation
|
Published in |
Springer Handbooks, January 2023
|
DOI | 10.1007/978-3-030-96729-1_38 |
Book ISBNs |
978-3-03-096728-4, 978-3-03-096729-1
|
Authors |
Lee, Tae-Eog, Kim, Hyun-Jung, Yu, Tae-Sun |
Country | Count | As % |
---|---|---|
Unknown | 2 | 100% |
Type | Count | As % |
---|---|---|
Members of the public | 2 | 100% |
Country | Count | As % |
---|---|---|
Unknown | 6 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 3 | 50% |
Researcher | 1 | 17% |
Student > Master | 1 | 17% |
Unknown | 1 | 17% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 5 | 83% |
Unknown | 1 | 17% |