Springer Handbook of Semiconductor Devices
Springer International Publishing
Chapter title |
A Digital Twin for MEMS and NEMS
|
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Chapter number | 36 |
Book title |
Springer Handbook of Semiconductor Devices
|
Published by |
Springer, Cham, January 2023
|
DOI | 10.1007/978-3-030-79827-7_36 |
Book ISBNs |
978-3-03-079826-0, 978-3-03-079827-7
|
Authors |
Korvink, Jan G., Poletkin, Kirill V., Deng, Yongbo, Feng, Lihong |