Springer Handbook of Semiconductor Devices
Springer International Publishing
Chapter title |
Wet Chemical Processes for BEOL Technology
|
---|---|
Chapter number | 6 |
Book title |
Springer Handbook of Semiconductor Devices
|
Published by |
Springer, Cham, January 2023
|
DOI | 10.1007/978-3-030-79827-7_6 |
Book ISBNs |
978-3-03-079826-0, 978-3-03-079827-7
|
Authors |
Peethala, Cornelius Brown, Kelly, James J., Canaperi, Donald F., Krishnan, Mahadevaiyer, Nogami, Takeshi |
Country | Count | As % |
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Unknown | 1 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Other | 1 | 100% |
Readers by discipline | Count | As % |
---|---|---|
Chemical Engineering | 1 | 100% |