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Timeline
Chapter title |
Research on SEM’s Astigmatism Detection Based on Image Processing
|
---|---|
Chapter number | 115 |
Book title |
Mechanism and Machine Science
|
Published by |
Springer Singapore, January 2017
|
DOI | 10.1007/978-981-10-2875-5_115 |
Book ISBNs |
978-9-81-102874-8, 978-9-81-102875-5
|
Authors |
Yihua Lu, Xianmin Zhang, Zhenya He |
Editors |
Xianmin Zhang, Nianfeng Wang, Yanjiang Huang |