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The Physics of Micro/Nano-Fabrication
Overview of attention for book
Table of Contents
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Book Overview
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Chapter 1
Preliminary Survey
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Chapter 2
Particle Beams
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Chapter 3
Plasmas
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Chapter 4
Layering Technologies
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Chapter 5
Pattern Generation
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Chapter 6
Microcharacterization
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Chapter 7
Limits to Nanofabrication
Overall attention for this book and its chapters
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Mentioned by
syllabi
1
institution with syllabi
Readers on
mendeley
46
Mendeley
Book overview
1. Preliminary Survey
2. Particle Beams
3. Plasmas
4. Layering Technologies
5. Pattern Generation
6. Microcharacterization
7. Limits to Nanofabrication
Summary
Syllabi
This data is correct as of December 2015 - for more up to date information, please visit
https://opensyllabus.org/
So far, Altmetric has seen this research output assigned in
1
syllabus from an institution on Open Syllabus Project.
Institution
Syllabi count
Course subject areas covered
George Mason University
1
Unknown